EasyGas™ 1000 - Gas Cabinets & Gas Delivery Systems

Download Easy Gas 1000 Brochure

FACILITIES REQUIREMENTS
¹Pneumatic Supply	Adjustable to 90 psig	1 slm max.
²Process Purge	Adjustable to 85 psig	30 slm max.
³Vacuum Drive	Adjustable to 85 psig	85 slm max.
⁴Process Vent	>1.0" WC	100 slm
¹Power	115V/3A	N/A
Sprinkler [if used]	30 psig	31 gpm
⁵Exhaust	>0.15" WC	300 scfm(2-cyl)
	>0.15" WC	450 scfm (3-cyl)
¹Needed only with optional FlexPowr™ Controller ²Needed only with 4-Valve, 6-Valve gas panel configurations ³Needed only with 6-Valve gas panel configurations ⁴Needed only with 3, 4, 6-Valve gas panel configurations ⁵Damper must be adjusted to meet 200 fpm face velocity as required by UFC.

Turnkey solution for nanomaterial synthesis

The EasyGas™ 1000 Gas Cabinet is designed to cover a wide range of cylinder gas delivery applications. In its simplest form, the EasyGas™ Gas Cabinet houses 1, 2, 3 or 4 gases, and includes a high purity, manual gas panel for each gas. Modular EasyGas™ Panels are available in 1, 2, 3, 4, 5 and 6-Valve designs for Process and Instrumentation Diagrams. Each panel may be tailored to the specific gas and application.

Myriad of Automated Alarm and Panel Shutdown Options

With the addition of the optional FlexPowr™ Controller, the EasyGas™ Cabinet can support a myriad of automated ALARM and panel SHUTDOWN options such as: Auto-Switchover, Excess Flow Sensors, Low Cylinder Pressure Alarms, High Delivery Pressure Alarms, Gas Leak Sensors, Scales and more! The FlexPowr™ Controller can support up to eight (8) user-settable alarm inputs and eight (8) user-settable alarm outputs. The EMO slam button and Exhaust Pressure Sensor are included with the FlexPower™ controller option.

Modular Design Meets Your Exact Gas Delivery Needs

EasyGas™ 1000 makes it simple to meet your exact gas delivery needs. Our modular design concept allows you to use a building-block method to configure a gas cabinet to your specifications.

Begin by choosing one of several cylinder enclosure configurations, then proceed to the gas panel level by selecting the gas panel purity. From the standard
3-Valve UHP panel, you can choose to add PURGE capability (4-Valve) or PURGE/EVAC capability (6-Valve).

Add safety and peace-of-mind by purchasing the optional FlexPowr™ Controller and selecting which panels you want to shutdown on ALARM. Fitted with a normally-closed ESO Valve for automatic shutdown, the FlexPowr™ Controller can support up to 4 dry-contact alarm inputs. Exhaust pressure switch, gas leak detection, and UVIR are just some of the optional controls components available to prompt shutdown.

Cylinder Cabinets:
Standard Configurations:

1-cyl, [1-process]
2-cyl, [1-process, 1-purge]
2-cyl, [2-process]*
3-cyl, [3-process]*
3-cyl, [2-process, 1-purge]

Gas Panel / Manifold Purity:
Standard Configurations:

UHP construction: orbitally welded/VCR® 316L SS or VIM/VAR
UHP grade regulator (nontied diaphragm standard)
UHP grade diaphragm valves (20 Ra standard)

HP Gas Panels:
Standard configurations:

3-Valve design [HP vent]
4-Valve design [adds PURGE]
6-Valve design [adds EVAC]

UHP Gas Panels:
Standard configurations:

25 Ra surface finish
Dual stage regulators
Outlet filters (0.003 µm)
DISS cylinder fittings

Industrial Gas Panels:
Standard configurations:

3-Valve process gas panel [adds HP vent, 1-Valve is standard]

Optional FlexPowr™ Controller

Automatic shutdown of process gas panels
Up to 8 user-definable alarms
Up to 8 user-definable outputs
Audible/visible alarm indication
EMO button
Multilevel password protection
CLASS 100/CLASS 10 clean room assembly and test

FlexPowr™ Control Components

Exhaust pressure switch
HI cylinder pressure switch
HI delivery pressure switch
Integrated gas leak detection
UVIR detection
Excess flow sensor

Other Equipment Options

Adjustable cylinder shelves
Restrictive flow orifices
Cylinder scales
CGA torque wrenches

Dimensions*

1-cyl: 18"W x 72"H x 19"D
2-cyl: 24"W x 72"H x 19"D
3-cyl: 36"W x 72"H x 19"D

Code and Stardards Referenced

ASME Section IX
SEMI® S2 Safety Guidelines for Semiconductor Manufacturing Equipment
NFPA® 79, 496, 70 [NEC®]
Factory Mutual®
UL®
CE®

FACILITIES REQUIREMENTS
¹Pneumatic Supply	Adjustable to 90 psig	1 slm max.
²Process Purge	Adjustable to 85 psig	30 slm max.
³Vacuum Drive	Adjustable to 85 psig	85 slm max.
⁴Process Vent	>1.0" WC	100 slm
¹Power	115V/3A	N/A
Sprinkler [if used]	30 psig	31 gpm
⁵Exhaust	>0.15" WC	300 scfm(2-cyl)
	>0.15" WC	450 scfm (3-cyl)
¹Needed only with optional FlexPowr™ Controller ²Needed only with 4-Valve, 6-Valve gas panel configurations ³Needed only with 6-Valve gas panel configurations ⁴Needed only with 3, 4, 6-Valve gas panel configurations ⁵Damper must be adjusted to meet 200 fpm face velocity as required by UFC.

Please note that manual and/or semi-automated systems like the EasyGas™ 1000 are not recommended for use in all applications. First Nano recommends that FULLY AUTOMATED SYSTEMS be used for toxics, corrosives, pyrophorics, and other highly hazardous gases/liquified gases.

Please contact us for further details.