FirstNano® EasyTube® 3000 Series standard operating procedure from the Integrated Nanosystems Research Facility of University of California Regents. View the video to see an example of how one of our R&D systems is used.

1. What carbon nanotube (CNT) nanomaterials can be produced with the EasyTube® systems?
  • Single Walled Carbon Nanotubes (SWCNTs)
  • Multi Walled Carbon Nanotubes (MWCNTs)
  • Vertically Aligned Carbon Nanotubes (VACNTs)
  • Horizontally Aligned Carbon Nanotubes (HACNTs)
  • Bulk Carbon Nanotube Powder
2. What kind of 1D nanomaterials (nanowires / nanotubes) can be produced with the EasyTube® systems?
  • Carbon Nanotube (CNTs)
  • Silicon Nanowires (SiNWs)
  • Boron Nitride Nanotubes (BNNTs)
  • Germanium Nanowires
  • Zinc Oxide Nanowires (ZnO NWs)
  • Gallium Nitride Nanowires (GaN NWs)
  • Many others, consult factory for details
3. What are the specifications of the nanomaterials?
  • Single Walled Carbon Nanotubes (SWCNTs)
    • Diameter from 1 to 3 nm
    • Length from a few µm to tens µm
  • Multi Walled Carbon Nanotubes (MWCNTs)
    • Diameter from 5 to 20 nm
    • Length from a few µm to a few millimeters
  • Vertically aligned Carbon Nanotube (VACNT)
    • Diameter from 10 to 20 nm
    • Length from a few µm to a few millimeters
  • Silicon Nanowires (SiNWs)
    • Diameter from 10 nm to 1 micrometer
    • Length up to tens of µm
4. What catalyst is typically used for nanomaterial synthesis?
  • For Carbon Nanotube growth
    • Nickel (Ni) for Carbon Nanotube growth
    • Cobalt (Co) for Carbon Nanotube growth
    • Iron (Fe) for Carbon Nanotube growth
  • For Nanowire growth
    • Gold nanoparticles for Silicon Nanowires (SiNWs)
    • Gold nanoparticles for Zinc Oxide Nanowires (ZnO NWs)
5. How is the catalyst prepared?
  • As a solution form then spin-coated onto the substrate
  • By sputtering or electron beam evaporation of a thin film onto a substrate
6. What are the precursors?
  • Precursors for Carbon Nanotube growth
    • Gas precursors
      • Methane (CH4)
      • Ethylene (C2H4)
      • Acetylene (C2H2)
      • Hydrogen (H2)
      • Others
    • Liquid precursors
      • Ethanol (C2H5OH)
      • Water (H2O)
      • Others
  • Precursors for Nanowire growth
    • Gas precursors
      • Silane (SiH4) for Silicon Nanowires
      • Hydrogen (H2)
    • Liquid precursors
      • Silicon tetrachloride (SiCl4)
    • Solid precursors
      • Zinc Oxide powder for Zinc Oxide Nanowires
      • Others
7. What type of substrates can be used?
  • Silicon
  • Silicon substrates with metal coatings
  • Copper
  • Molybdenum
  • Quartz
  • Glass - can be used with low temperature
    (<550 Celsius) processes
8. What systems does FirstNano® offer?
9. Are recipes provided with the EasyTube® systems?

Yes - FirstNano® can provide recipes for:

  • Single Walled Carbon Nanotubes (SWCNTs)
  • Multi Walled Carbon Nanotubes (MWCNTs)
  • Vertically Aligned Carbon Nanotubes (VACNTs)
  • Horizontally Aligned Carbon Nanotubes (HACNTs)
  • Silicon Nanowires (SiNWs)
  • Other nanomaterials synthesis recipes can be provided, consult factory for details
  • The FirstNano® research team can develop other nanowires synthesis on our EasyTube® systems
  • FirstNano® also provides assistance to customers on new process development
10. What is the difference between the EasyTube® 2000 and the EasyTube® 3000 system?

Both ET2000 and ET3000 are modular systems with multiple options.

  • ET2000 is a three inch tube system with a smaller footprint
  • ET3000 is larger than the ET2000 and can be equipped with:
    • Loadlock
    • Five inch process tube
    • Many other options available, see the ET2000 and ET3000 product pages
11. What is the throughput of an EasyTube® system?
  • A complete run includes these steps:
    • Purge with Argon (Ar) or evacuate to base pressure if you have the vacuum option
    • Heating to growth temperature
    • Processing at growth temperature
    • Cooling
  • The EasyTube® system uses a unique design that allows the furnace to automatically open during the cool down stage reducing the time to less than an hour and total process time to 90 to 120 minutes.
  • In the EasyTube® 3000 system equipped with a Loadlock, the sample can be unloaded from the process tube at full temperature and cooled inside the Loadlock while keeping furnace at high temperature. It saves both cooling time and furnace heating time. A complete process can be finished within one hour.