Processes

FirstNano® Line of R&D Systems Process Capabilities.

 

Rapid Thermal Processing (RTP)

RTP-circle

Chemical Vapor Infiltration (CVI)

Metal Foam

Fluidized Bed CVD (FBCVD)

FBCVD

Metal Organic CVD (MOCVD)

MOCVD-circle

Plasma Enhanced CVD (PECVD)

PECVD-circle

Selenization/Sulfurization (SAS)

SAS-circle

The material examples shown were processed in the CVD applications lab using FirtsNano® EasyTube® systems