FirstNano® is CVD Equipment Corporation's research and development (R&D) brand of products. Various academic research centers, industry leaders, and government research labs worldwide have purchased the system and are employing it currently in their research.

CVD Equipment Corporation specializes in the manufacture of innovative, high quality process equipment suitable for the synthesis of a variety of thin films, carbon nanotubes, nanowires, LEDs, MEMS, nanostructures, nanomaterials, and other applications. The FirstNano® line of systems are applicable to nanoscale research that intersects cross-functional disciplines in semiconductor, applied physics, biotechnology, chemical, and mechanical engineering fields. FirstNano® branded process system models include; EasyTube® Systems, and the EasyGraphene™ Graphite Box.

In addition to our R&D process systems,  we offer a complete line of gas storage, gas delivery, and gas abatement systems under the FirstNano® brand. These system models include; EasyGas™ EasyPanel™, and EasyExhaust™.

Our turnkey solutions allow you to configure a totally integrated system, including safety interlocks and interconnecting gas lines, to support your production projects safely and with peace of mind. Our engineering team can configure systems for specific applications and research development.

What Researchers Are Saying About FirstNano®

"The turn-key EasyTube® System is the most practical and convenient instrument for solutions in nanostructure synthesis.”

Dr. Wonbong Choi
Professor of Mechanical and Materials Engineering

I built two CVD systems when setting up my lab. They were basically clones of a system I had used previously, so the design was already in my mind and mostly down on paper. However, I severely underestimated the time involved in selecting all the proper pieces and parts. By the time things finally came together and the first system came on-line, I found myself wishing I had simply purchased complete solutions from a company that had already invested the time to engineer a reliable system. As a new faculty member, funds are a limited resource, but time is even more so. Quickly getting the ball rolling on research is worth more than what one might save with a home-built approach.

Erik Einarsson, Ph.D
Assistant Professor

"I am glad to share with you the good news that ever since the very first batch of samples we continued to produce long and uniform silicon nanowires. Suffice to say that members of our research group are all impressed with the turn-key reliability as well as extensive safety features of this LPCVD system which greatly satisfy the needs of our fundamental research program in nanomaterials. We also appreciate the custom system design effort to cater to our needs from your  expert team and your ability to deliver and install in a timely manner."

Jie Xiang
Assistant Professor of Electrical and Computer Engineering

"The FN/CVD Application & Research Lab provides our company with one-stop CNT process capabilities and technical staff support that we simply cannot get anywhere else and that help us accelerate the commercialization of our proprietary thin film technologies"

Vincent Stenger, Ph.D
Principal Research Engineer

"EasyTube® provides a very versatile platform for synthesizing various semiconductor nanowires. The configuration allows for consistent nanowire growths."

Yi Gu, Ph.D
Assistant Professor of Physics | Gu Research Group

"The researchers at the University of Cincinnati partnered with FirstNano®, a division of CVD Equipment Corp. of Ronkonkoma, N.Y., to use their laboratory and a specialized furnace called EasyTube® 3000.  With this equipment, the research team succeeded to produce 18 millimeter long CNT array which is considered the longest aligned CNTs reported ever."

Dr. Vesselin Shanov
Associate Professor of Chemical and Materials Engineering

"It has been a pleasurable interaction with the FirstNano® process and development team. Collectively, collaborations between the Cornell Nanoscale Facility and FirstNano® have yielded single wall carbon nanotube growth from lithographically defined catalyst pads on full four inch wafers. Incorporating wafer scale nanoscale fabrication processes with predefined carbon based systems represents a major step forward in creating complex carbon based nanostructures. This enhanced functionality raises intriguing possibilities in modern scientific research of widely disparate endeavors."

B. Rob Ilic, Ph.D
Research Associate | User Program Manager

"The purchase of the EasyTube® 3000 will enlarge the spectrum of our research with the growth of heterostructured nanowires, their doping, and with the possibility to extend the growth to a wide variety of other materials thanks to the liquid precursor kits. Our projects cover fundamental aspects (growth, carrier transport …) as well as potential applications (Nanoelectronics, Solar Energy, Nanophotonics, MEMS, and Sensors)."

Pascal Gentile
Laboratory of Physics of Materials and Microstructures