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(includes R&D CVD process systems, gas delivery & abatement systems, and all system standard features & process capabilities configuration tables)
FirstNano™ R&D CVD Process System Product Sheets
EasyTube® 101 Budget Friendly CVD System (25 mm x 50 mm)
EasyTube® 2000 CVD System (50 mm x 50 mm)
EasyTube® 3000 CVD/Annealing Process System (150 mm x 150 mm)
EasyTube® 6000 Multi-Tube Horizontal Furnace System (3 or 4 process tubes)
Materials/Process Development Capabilities Brochures
For information on our systems process capabilities and configurations, please refer to the FirstNano™ R&D Product Catalog above.