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First Nano, a division of CVD Equipment

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First Nano manufactures configurable turn-key CVD systems to meet the research & production needs in nanotechnology, solar, semiconductor and MEMS industries.

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We also provide access to our Application Lab where material processes can be developed in conjunction with First Nano/CVD research scientists.

Please visit our Application Lab page for fees and more information.

EasyCrystal™ Bridgman Furnace System

easycrystal vertical bridgman furnace

Vertical Growth (Bridgman) Furnace System is an advanced process tool for the growth of crystals...
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EasyGraphene™ Process Solutions

EasyGraphene™ Process Solution Equipment

Enables straightforward scaling of high quality CVD graphene from R&D to production quantities...
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EasyPanel™ System

easypanel uhp gas panel

UHP Gas Panels for high and low pressure, Ultra-High-Purity (UHP) gas delivery...
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EasyExhaust™ System

easyexhaust system - high temp furnace and water scrubbing system

High Temperature Pyrolizing Furnace and Water Scrubbing System capable of continually thermally...
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EasyGas™ 1000

easygas 1000 gas cabinet

High Quality Gas Cabinets and Gas Delivery Systems designed to cover a wide range of cylinder gas delivery...
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EasyGas™ 1500

easygas 1500 gas cabinet

Fully Automated Gas Cabinet providing reliable Ultra-High-Purity (UHP) specialty gas equipment...
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EasyTube® 101

easytube 101 advanced cvd process tool

Advanced CVD process development tool for the University or Industrial Researcher...
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EasyTube® 2000

easytube 2000 thermal cvd

Advanced turnkey thermal catalytic CVD process tool for synthesis of nanotube and nanowire...
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EasyTube® 2000 - VACNT Array

vertically aligned CNT

Vertically Aligned CNT array...
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EasyTube® 2000 - Fastcool™ Furnace

high throughput furnace

FastCool™ Furnace for High Throughput, provides better temperature stability and uniformity over...
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EasyTube® 2000 - Automated Wafer Loading

easytube 2000 Automated Wafer Loading

Ensures contamination-free handling and consistent gas sealing ...
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EasyTube® 2000 - Hot Loader and FastCool™ Furnace

Hot Loader and FastCool™ Furnace

Hot Loader to Load Sample into a Pre-Heated Chamber....
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EasyTube® 2000 - HTA High Temperature Annealing System

EasyTube® 2000 - HTA High Temperature Annealing System

Graphite Resistance Heated High Temperature Annealing (HTA) System is...
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EasyTube® 3000

easytube 3000 cnt and nanowire cvd system

Advanced Catalytic CNT and Nanowire CVD System process tool for...
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EasyTube® 3000 -High Purity Graphite Susceptor

Loadlock with a 3 inch wafer on a high purity graphite susceptor

Loadlock with a 3 inch wafer on a high purity graphite susceptor loading...
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EasyTube® 3000 - RF Plasma

easytube 3000 rf plasma

Remote RF Plasma used to ionize gas prior to entering the thermal deposition...
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EasyTube® 3000 - CNT's Batch Synthesis

EasyTube 3000 - CNT Batch Synthesis

Vertically aligned CNT's are produced on a batch of 4" wafers...
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EasyTube® 3000 - High Throughput Loader

EasyTube 3000 - High Throughput Loader

The High Throughput Loader enables fast sample heating to improve nanotube...
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EasyTube® 3000 - Infrared Heating Furnace

EasyTube 3000 - Infrared Heating Furnace

Infrared Heating Furnace provides Rapid Thermal Process (RTP) capability...
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EasyTube® 4000 PECVD System

easytube 4000 advanced plasma cvd system

Advanced Plasma Enhanced CVD process tool, synthesis of nanomaterials and thin films...
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EasyTube® 5000 MOCVD System

easytube 500 mocvd equipment

MOCVD System, advanced research Reactor for depositing a wide variety of III-V and II-VI layers...
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EasyTube® 6000 - Four (4) Tube Horizontal Furnace System

easytube 6000 advanced multi furnace system

Advanced Multi-Tube Furnace System for Carbon Nanotubes (CNT), Nanowires, Oxidation...
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EasyTube® 6000 - Batch Wafer Process

EasyTube 6000 - Batch Wafer Process

Utilizes a Cantilevered Loading System, Horizontal HEPA Filtered Laminar Flow Hood...
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EasyTube® 8000 - Fluidized Bed Reactor

EasyTube® 2000 - HTA High Temperature Annealing System

RF Induction Heated EasyTube® 8000 Series Fluidized Bed Chemical Vapor Deposition System is...
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Customer Testimonials

"With First Nano's EasyTube® 3000, the research team succeeded to produce 18 millimeter long CNT array which is considered the longest aligned CNT's reported ever."

-Dr. Vesselin Shanov
The University of Cincinatti

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Upcoming Tradeshows

Graphene Innovation Conference (GRAPCHINA)
September 1st – 3rd 2014
Sheraton Ningbo Hotel
Ningbo, China
Booth #TBD

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Latest News

5/15/14
CVD Reports First Quarter Orders, Revenues and Backlog Increase
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4/1/14
CVD Selling up to 300 mm CVD Graphene
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