First Nano manufactures custom turnkey thermal CVD & PECVD systems to meet the research & production needs in nanotechnology, solar, semiconductor and MEMS industries.
Our Applications include:
We provide turnkey solutions with our:
We also provide access to our Application Lab where material processes can be developed
in conjunction with First Nano/CVD research scientists.
Please visit our Application Lab page for fees and more information.
"With First Nano's EasyTube™ 3000, the research team succeeded to produce 18 millimeter long CNT array which is considered the longest aligned CNT's reported ever."
-Dr. Vesselin Shanov
The University of Cincinatti
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EasyCrystal™ Bridgman Furnace System

Vertical Growth (Bridgman) Furnace System is an advanced process tool for the growth of crystals...
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EasyPanel™ System

UHP Gas Panels for high and low pressure, Ultra-High-Purity (UHP) gas delivery...
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EasyExhaust™ System

High Temperature Pyrolizing Furnace and Water Scrubbing System capable of continually thermally...
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EasyGas™ 1000

High Quality Gas Cabinets and Gas Delivery Systems designed to cover a wide range of cylinder gas delivery...
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EasyGas™ 1500

Fully Automated Gas Cabinet providing reliable Ultra-High-Purity (UHP) specialty gas equipment...
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EasyTube™ 101

Advanced CVD process development tool for the University or Industrial Researcher...
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EasyTube™ 2000

Advanced turnkey thermal catalytic CVD process tool for synthesis of nanotube and nanowire...
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EasyTube™ 2000 - VACNT Array

Vertically Aligned CNT array...
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EasyTube™ 2000 - Fastcool™ Furnace

FastCool™ Furnace for High Throughput, provides better temperature stability and uniformity over...
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EasyTube™ 2000 - Automated Wafer Loading

Ensures contamination-free handling and consistent gas sealing ...
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EasyTube™ 2000 - Hot Loader and FastCool™ Furnace

Hot Loader to Load Sample into a Pre-Heated Chamber....
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EasyTube™ 3000

Advanced Catalytic CNT and Nanowire CVD System process tool for...
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EasyTube™ 3000 - RF Plasma

Remote RF Plasma used to ionize gas prior to entering the thermal deposition...
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EasyTube™ 3000 - CNT Batch Synthesis

Vertically aligned CNT's are produced on a batch of 4" wafers...
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EasyTube™ 3000 - High Throughput Loader

The High Throughput Loader enables fast sample heating to improve nanotube...
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EasyTube™ 3000 - Infrared Heating Furnace

Infrared Heating Furnace provides Rapid Thermal Process (RTP) capability...
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EasyTube™ 4000

Advanced Plasma Enhanced CVD process tool for the synthesis of...
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EasyTube™ 6000

Advanced Multi-Tube Furnace System for Carbon Nanotubes (CNT), Nanowires, Oxidation...
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EasyTube™ 6000 - Batch Wafer Process

Utilizes a Cantilevered Loading System and has...
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Additional products 


NanoManufacturing Conference & Exhibits
Society of Manufacturing Engineers (SME)
March 28th - 29th 2012
Hynes Convention Center, Boston, MA USA
Booth# B106
More 2012 Tradeshows
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01/09/12
CVD Equipment Corporation – 2011 New Orders Increase 44% over 2010
Graphene™ Products
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11/29/11
CVD Equipment Corporation Offers Three Dimensional
Graphene™ Products
more 
11/28/11
CVD Equipment Corporation to Participate in the 7th Annual Livingston Nanotech Conference
more 
11/14/11
CVD Announces Record 3 and 9 Months 2011 Results
more 
10/19/11
CVD Announces Expansion of its Materials Business
more 
10/17/11
CVD Equipment Expands
more 
08/31/11
CVD Equipment Corporation has been invited to present at 3 Conferences during the week of September 12, 2011
more 
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