FirstNano® provides a range of advanced research and development chemical vapor deposition process tools for universities, startups, and industry research laboratories.
The systems are designed to meet today’s safety standards for handling pyrophoric, corrosive, flammable, and toxic gases such as hydrogen, silane, germane, diborane, hydrogen chloride, and metal organic precursors. All our systems are designed with exhausted metal cabinet enclosures which contain the reactor, furnace, power control, gas distribution, and electrical systems. The systems are engineered with ease of access to all components for maintenance purposes.
FirstNano® systems are powered by CVDWinPrC™, our proprietary realtime instrument control, data logging, and process editing software suite. CVDWinPrC™, included as standard, is equivalent to the package included with our industry-ready production equipment. A web interface connection allows for remote training, software upgrades, and system troubleshooting.
FirstNano®’s ultra-high purity gas lines and delivery systems are manufactured by Stainless Design Concepts (SDC), a division of CVD Equipment Corporation. We take advantage of the SDC 4,000 ft2 clean room fabrication facility, with multiple high purity orbital welding stations. Our manufacturing is vertically integrated; we procure raw materials and deliver finished systems. Contact us to schedule a visit to our facility on Long Island, New York, where you can witness our quartz fabrication, extensive machine shop, and build/test facilities.
FirstNano® systems can be configured with a range of modules to meet the often unique requirements of the R&D environment. More information can be found by clicking on the system images below.