Process Pressure Option

Processes containing oxygen or corrosive gas are recommended to run under Fomblin prepped pump or dry screw pump.
A dry pump provides the lowest process contamination from the vacuum system.
Customers can have either APCVD or LPCVD or both configurations on the system.
Customers can upgrade from only APCVD to APCVD and LPCVD in the future as needed.