EasyGas™ 1000 - High Quality Gas Cabinets and Gas Delivery Systems

Turnkey solution for nanomaterial synthesis

The EasyGas™ 1000 Gas Cabinet is designed to cover a wide range of cylinder gas delivery applications. In its simplest form, the EasyGas™ Gas Cabinet houses 1, 2, 3 or 4 gases, and includes a high purity, manual gas panel for each gas. Modular EasyGas™ Panels are available in 1, 2, 3, 4, 5 and 6-Valve designs for Process and Instrumentation Diagrams. Each panel may be tailored to
the specific gas and application.

Supports a Myriad of Automated Alarm and Panel Shutdown Options

With the addition of the optional FlexPowr™ Controller, the EasyGas™ Cabinet can support a myriad of automated ALARM and panel SHUTDOWN options such as: Auto-Switchover, Excess Flow Sensors, Low Cylinder Pressure Alarms, High Delivery Pressure Alarms, Gas Leak Sensors, Scales and more! The FlexPowr™ Controller can support up to eight (8) user-settable alarm inputs and eight (8) user-settable alarm outputs. The EMO slam button and Exhaust Pressure Sensor are included with the FlexPower™ controller option.

Modular Design Meets Your Exact Gas Delivery Needs

EasyGas™ 1000 makes it simple to meet your exact gas delivery needs. Our modular design concept allows you to use a building-block method to configure a gas cabinet to your specifications.

Begin by choosing one of several cylinder enclosure configurations, then proceed to the gas panel level by selecting the gas panel purity. From the standard
3-Valve UHP panel, you can choose to add PURGE capability (4-Valve) or PURGE/EVAC capability (6-Valve).

Add safety and peace-of-mind by purchasing the optional FlexPowr™ Controller and selecting which panels you want to shutdown on ALARM. Fitted with a normally-closed ESO Valve for automatic shutdown, the FlexPowr™ Controller can support up to 4 dry-contact alarm inputs. Exhaust
pressure switch, gas leak detection, and UVIR are just some of the optional controls components available to prompt shutdown.

Cylinder Cabinets:
Standard Configurations:

• 1-cyl, [1-process]
• 2-cyl, [1-process, 1-purge]
• 2-cyl, [2-process]*
• 3-cyl, [3-process]*
• 3-cyl, [2-process, 1-purge]
* Purge SideCar is an external, integrated
purge cylinder

Gas Panel/Manifold Purity:
Standard configurations

• UHP construction: orbitally welded/VCR® 316L SS or VIM/VAR
• UHP grade regulator (nontied diaphragm standard)
• UHP grade diaphragm valves (20 Ra standard)

HP Gas Panels:
Standard configurations

• 3-Valve design [HP vent]
• 4-Valve design [adds PURGE]
• 6-Valve design [adds EVAC]

UHP Gas Panels:
Standard Configurations:

• 25 Ra surface finish
• Dual stage regulators
• Outlet filters (0.003 µm)
• DISS cylinder fittings

Industrial Gas Panels:
Standard Configurations:

• 3-Valve process gas panel [adds HP vent, 1-Valve is standard]

Optional FlexPowr™ Controller

• Automatic shutdown of process gas panels
• Up to 8 user-definable alarms
• Up to 8 user-definable outputs
• Audible/visible alarm indication
• EMO button
• Multilevel password protection
• CLASS 100/CLASS 10 clean room assembly and test

FlexPowr™ Control Components

• Exhaust pressure switch
• HI cylinder pressure switch
• HI delivery pressure switch
• Integrated gas leak detection
• UVIR detection
• Excess flow sensor

Other Equipment Options

• Adjustable cylinder shelves
• Restrictive flow orifices
• Cylinder scales
• CGA torque wrenches

Dimensions*

• 1-cyl: 18"W x 72"H x 19"D
• 2-cyl: 24"W x 72"H x 19"D
• 3-cyl: 36"W x 72"H x 19"D

Code and Stardards Referenced

• ASME Section IX
• SEMI® S2 Safety Guidelines for Semiconductor Manufacturing Equipment
• NFPA® 79, 496, 70 [NEC®]
• Factory Mutual®
• UL®
• CE®