EasyExhaust™ 460 - Wet Scrubbing system for corrosive gases

Chemical Vapor Deposition processes require the use of flammable, toxic, or pyrophoric gases,
as well as other potentially hazardous materials, in order to achieve the desired properties of the
film being deposited or grown.  Not all of the gases introduced into the reaction chamber are consumed
by the deposition process, and many of these gases remain in the exhaust stream in various concentrations
after passing through the deposition chamber.  Environmental and safety regulations necessitate the
post deposition combustion and/or neutralization of the unconsumed materials in the gas stream before
being released into the atmosphere.

The EasyExhaust™460 Spray Packed Tower Exhaust System will wet scrub, remove particles and cool
the exhaust gases prior to exiting the system. To further reduce water consumption, the system can be
provided with an automatic pH neutralization of the recirculating fluid using a Sodium Hydroxide (NaOH)
10 – 50% solution. The recirculating fluid flow is monitored and can be dumped periodically as required.

Integration of the EE 400 series control system into the process equipment reduces cost and provides
seamless operation through the primary user interface.  The EE 400/410/460 can treat up to
20 SLPM of H2 or equivalent gases.