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EasyTube™ 101 Configuration

To customize your system please fill in the following form.

Download ET 101 Brochure pdf
Download Facility and System Layout Overview pdf


What type of process do you want to run:


Select your Gas Lines and options here:


Description

Enter (1) Chemical Name or Formula per line

Select Maximum
Flow Rate (SLM)

Gas Leak Detection

Select if a Purge/Reactant option is needed

Select if a Run/Vent option is needed

Select type of Input Line (Gas or Bubbler)

Select Bubbler minimum Temp.
(°C)

Select Bubbler maximum Temp.
(°C)

Input Line # 1 Inert Gas
Input Line # 2 Gas
Input Line # 3 Gas
Input Line # 4
Input Line # 5 Gas
Input Line # 6
Input Line # 7 Gas
Input Line # 8

Notes:
1. For Input Line #1: only AR, N2 or other inert gases can be chosen
2. For some reacting chemicals, for example Corrosive or Pyrophoric, we recommend choosing a Purge/Reactant and a Run/Vent option for optimal process operational safety, process repeatability and maximum system uptime.

Purge/Reactant: Improve component lifetime and process purity
- Instead of a 2 port valve, a 3 port valve is used with appropriate line connections and other system upgrades.
- Allows to clean out the lines with an inert gas before and after the Corrosive, Pyrophoric or other reacting chemicals are being flown through the mass flow controller.
- Increases process control accuracy and minimizes clogging of valves and mass flow controllers.
- This option is typically needed for bubblers and MOCVD chemicals.

Run/Vent: For sharp interface transition
- Allows to establish a constant flow by flowing first to the exhaust through a separate vent line, thus providing a sharp growth rate transition step.
- After the flow is established and stabilized, the Run/Vent valve switches the flow from the Vent line to the Process Line without a change in flow rates.
- This option is typically needed for bubblers and MOCVD chemicals.


Process Heating
Temperature determines the thermal barrier of chemical reactions. Choose among the factor of heating rate or temperature uniformity.
Resistance Heating Standard
Infrared Heating Optional

System & Process Controls
System control - Windows™ based process control software CVDWinPrC™ running on PC Standard
Hardware/Safety control - Combination of hardware interlock and software interlock through PLC which also communicates with CVDWinPrC™ software Standard
Control loop - All control loops are PID controlled and user changeable Standard
Process pressure- A 1000 Torr and 10 Torr pressure sensor is used to control the process pressure for low pressure operation via a motorized controlled butterfly valve (oil pump options) or by VFD controlled pump motor speed (Screw pump) Standard
Gas flow - Through Mass Flow Controller Standard
Bubbler liquid evaporation control - Through PID controlled bubbler temperature, through Mass Flow Controller feeding inert gas to bubbler and optionally also through pressure control in head space of bubbler Standard

Process Pressure Option
Pressure controls the reaction uniformity and structure characteristic. Choose among these capacities.
APCVD System 1 - Atmospheric, No vacuum pump Standard
LPCVD/APCVD System 1 - Low pressure, Oil pump with mist elimination package on input and exhaust side Optional
LPCVD/APCVD System 2 - Low pressure, Oil Pump with Fomblin Prepped Optional
LPCVD/APCVD System 3 - Low pressure, Dry mechanical screw pump Optional
LPCVD/APCVD System 4 - Low pressure, Customer supplied vacuum pump (subjective to approval) Optional

Pneumatic Valve Option
Faster valve switching time improves ALD layer deposition cycle time.
Air-operated pneumatic valve sequenced by 24 VD DC electric solenoids Standard
ALD Air-operated fast acting pneumatic valve sequenced by fast acting electric solenoid Optional

Quartzware Parts
Process tube, sample holder and gas injector are made from quartz, which is chemical inert to most CVD process gases.
Quantity
Standard Quartzware set - 1 APCVD and/or LPCVD/APCVD Process tube depending on process pressure option selected, 1 Quartz gas Injector, 1 Quartz sample holder Standard
Additional Standard Quartzware set - 1 APCVD and/or LPCVD/APCVD Process tube depending on process pressure option selected, 1 Quartz gas Injector, 1 Quartz sample holder Optional
Custom Quartzware Send us your special requirements
Optional

Additional Accessory Options
Bubblers need to be either purchased from CVD or provided by customer. If provided, consult factory for compatibility.
Quantity
Bubbler 250 mL
Bubbler 500 mL
Imperial (inch) Tool Kit
Seismic Floor Mounts

Gas Delivery Options
Depending on the gas line you choose, you may need a gas delivery system.

Enter Description of Gases Enter Valve Configuration
Quantity    
Air Pump - Air Feed via an air pump for process tube cleaning on CNT systems    
EasyPanel™ - UHP Gas Panels for Argon, Nitrogen, Helium, Oxygen - specify
EasyGas™ 1000 - Gas Cabinets for flammable, toxic, Pyrophoric and corrosive gases - specify
EasyGas™ 1500 - Gas Cabinets for flammable, toxic, Pyrophoric and corrosive gases - specify

Integrated Exhaust Treatment Options
By-products from the chemical vapor deposition may need to be oxidized and/or neutralized before being exhausted to the atmosphere. The systems below provide you with different treatment options depending on your process exhaust conditions.

Quantity
EasyExhaust™ 460 - Wet Scrubbing system for corrosive gases
EasyExhaust™ 400 - Burn Box system for flammable gases
EasyExhaust™ 410 - Pyrolizing and Wet Scrubbing system for flammable, toxic and corrosive gases

Standard and optional Services
# of people
Factory Training - Included in price for 1 person - includes meals and hotel for 4 days, 3 nights Standard
Factory Training - optional for additional personnel - includes meals and hotel for 4 days, 3 nights Optional
Onsite Installation & Training - optional, Includes travel expenses & training at your facility for 3 days Optional
Factory Test runs at our Application Laboratory - (typically available at $300/hr. of system run time and $ 150/hr. for SEM or other analysis, contact us for further information Optional

Spares Parts
Additional spare parts you might consider purchasing.
APCVD Quartz Process Tube - For atmospheric process operation
LPCVD/APCVD Quartz Process Tube - For low pressure and atmospheric process operation
Quartz Gas Injector - quartz tube with perforated holes above substrate
Quartz Sample Holder - sample holder with support
Profiling Thermocouple - For manually temperture profiling the oven
Quartz Exhaust Trap - used for CNT systems
Process Tube O-ring Set - O-ring set for process tube
End Cap Tube O-ring Set - O-ring set for end cap
Particle filter for vacuum option - replacement particle filter
Replacement disposable foreline trap (desiccant type)
Replacement standard vacuum pump oil - for Oil vacuum pump
Replacement Fomblin vacuum pump oil - for Fomblin oil based vacuum pump
Infrared Heater Spare Lamps


Display
Desk mounted Monitor, Keyboard & Mouse, CVD supplied Standard
CVD Supplied Cabinet mounted Monitor, Keyboard & Mouse, CVD supplied Optional

Electrical Configuration
208 VAC, 60 Hz, 3 Phases, 5 Wires Standard
Specify voltage, frequency, phases and number of wires Optional

Warranty
12 months from shipment Standard
24 months from shipment Optional
36 months from shipment Optional

Packaging/Transport
Mounted on palette for shipment - need to be lifted off palette to move it to final location Standard
Removable Caster Set - Wheels to allow easy movement of system into your laboratory Optional
Shipped in a Crate - additional protection during shipment, need to be lifted off palette to move it to final location Optional

Discounts
University Discount (5%)
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First Nano ET101 services

Payment Terms to approved customers: 30/60/10

    

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