EasyGas™ 1500 Fully Automated
UHP Gas Cabinet

Download EasyGas 1500 Brochure

Safe & Reliable UHP Specialty Gas Equipment

The EasyGas™ 1500 Fully Automated Gas Cabinet is representative of First Nano's continuous drive and commitment to providing the industry’s safest and most reliable Ultra-High-Purity (UHP) specialty gas distribution systems available. Mass customization and modular design concepts of the gas panels, controls architecture and cabinet enclosure have combined to widen the product configuration spectrum and greatly increase user flexibility.

From the Fab to the Lab to the University, First Nano's sets itself apart as the clear choice forvalue in today’s budget - conscious environment.

The EasyGas™ 1500 makes it simple to meet your exact gas distribution systems needs. Our Modular Design Concept allows for component-level replacement, ease of service and upgradeability. Begin by choosing one of several "core" gas cabinet configurations. Start customizing right at the gas panel level with standard choices for regulator type, valve type, transducer ranges and purity level. Zero in further with a myriad of options like: integrated scales, onboard gas leak detection, purgeable splitters, RFO, filtration, purification, and many more. First Nano's SPEC √™ worksheet will walk you through this process in a simple, step-by-step manner. Our Sales Engineers are always available to work through the customization process with you, either by phone, or in person.

Standard Configurations:

• 2-cyl, [1-process, 1-purge]
• 2-cyl, [2-process], external purge source
• 3 cyl, [2-process, 1-purge]
• Independent out or autoswitchover
• Cabinet-to-cabinet switchover

Standard Controls / Features:

• PLC control of all critical functions
• Bright 10.4" color touch screen interface
• Proven auto-sequenced routines for all aspects of operations and maintenance
• User settable limits for all process and alarm parameters
• Exhaust pressure monitor
• On-screen warnings, alarms, prompting and instructions
• Emergency Off (EMO)
• EMO and EGO inputs
• Alarm outputs
• Multi-level password protection
• Diagnostics screen
• Valve cycle count screen
• Z-Purge ready for Class I Div II compliance

Process Panel Features:

• Ultra-High-Purity (UHP) 316L SS or VAR construction
• Surface finish 10 Ra avg. or better
• Springless diaphragm valves
• Tied-diaphragm process regulator
• Precision flow sensor
• Vacuum assisted purging
• UHP orbitally welded with strategic VCR® breaks
• Helium leak tested to 1.0 x 10-9 atm*cc/s
• CLASS 100 / CLASS 10 cleanroom assembly and tested

Dimensions*

• 1 cyl: 18"W x 84"H x 19"D
• 2 cyl: 24"W x 84"H x 19"D
• 3 cyl: 36"W x 84"H x 19"D

* Height dimensions include controller. Add 6.0" to width with cylinder heating option.

Codes and Standards Referenced:

• SME Section IX
• SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
• NFPA® 79, 496, 70 [NEC®]
• Factory Mutual®
• UL®
• CE®

* Damper must be adjusted to meet 200 fpm face velocity as required by UFC

Please contact us for further details.

2-Cylinder Cabinet