EasyExhaust™ - Scrubber, Abatement Gas Conditioning System

Download Easy Exhaust System Brochure

Thermally Decomposes and Oxidizes Exhaust Gases

First Nano’s exhaust gas conditioning system provides proper safety to plant and personnel in the handling of
hazardous effluents from nanotechnology, solar and semiconductor processes. The Easy Exhaust™ System is capable of continually thermally decomposing and oxidizing the reactive exhaust gases. The system can be configured with both a high temperature pyrolizing furnace and a liquid packed tower scrubbing system to ensure the proper scrubbing and handling of exhaust gases.

First Nano has taken extensive measures to provide fail-safe designs and combine them with forward thinking features in an effort to offer a safe, versatile product to meet specialty gas exhaust delivery requirements.

Process and effluent piping integrity are ensured through the use of 316L or 304 SS tubing and components.

Turnkey solution for nanomaterial synthesis

The EasyExhaust™ System 410, 610, 1010 and 1510 are part of our Turn-Key product offering. The combination of the EasyTube™, EasyGas™ and EasyExhaust™ systems offers you one vendor that is responsible for the interfacing of all major components of your process. Start-up and qualification is "made easy".

Our field proven system performance and solid customer base establishes First Nano as the clear choice in leading edge semiconductor, nanotechnology and solar development with support equipment for advanced research facilities.

Standard Configuration

• Digital Temperature Control
  
• Furnace Operating Temp of 900° C
  
• Temperature Deviation Detection with Auto ShutDown and Audible Alarm
  
• Automatic Shutdown on an Open Thermocouple
  
• Vertically Mounted Inconel™ Reaction Tube with Water-Cooled Ends
  
• Inconel™ Internal Baffles for Increased Reaction Surface Area
  
• Inconel™ End Baffles to Decrease Furnace Radiation Losses
  
• Water Spray Packed Tower Exhaust - Removes Particulate and Cools Exhaust
• Touch Screen Interface
• PLC Control for Logic Interface
  
• Nitrogen Flowmeter to Exhaust Line
• Over Temp Protection
  
• Nitrogen Shut-Off Valve
  
• Air Flowmeter for Oxidation
  
• Air Shut-Off Valve
  
• Audible and Visual Alarms
  
• One (1) Year Warranty
  

Options

• Water Recirculation System
• Drain Pump
  
• Sodium Hydroxide Scrubbing Solution
  
• Remote Control Panel
  

EasyExhaust™ System Standard Interlocks

• Pressure Monitor with Indicator
  
• Water Flow Switch with Indicator
  
• Air Flow Switch with Indicator
  
• N2 Flow Switch with Indicator
  
• Over Temp Protection
  
• Outputs available to interface with Tool and Gas Cabinets
  

Dimensions (inches)

• 410/610: 28 Width, 27 Depth, 74 Height
• 1010: 36 Width, 36 Depth, 74 Height
• 1510: 48 Width, 48 Depth, 80 Height

*Alternate voltage and frequency available - consult factory

Please contact us for further details.