EasyExhaust™ Gas Abatement Systems

Download Easy Exhaust System Brochure

Our EasyExhaust™ Gas Abatement Systems provide proper safety to plant and personnel in the handling of hazardous gases. We have taken extensive measures to provide fail-safe designs and combine them with forward thinking features in an effort to offer a safe, versatile product for specialty gas exhaust requirements.

The EasyExhaust™ Burn Box/Pyrolizer will
thermally decompose the exhaust gases.

Features

• Maximum furnace operating Temp. - 900 °C
  
• Quartz reaction tube
• Internal baffles for increased reaction surface area.
• Thermocouple for temperature control and monitoring
• Integrated air flow switch

Exhaust Gas/ Liquid Precursors

• CO
• C₂H₂
• C₂H₄
• CH₄
• H₂

The EasyExhaust™ Wet Scrubber removes particles and cools the exhaust gases prior to exiting the system.

Features

• Water spray packed tower exhaust
  
• Water recirculation system to conserve
  water usage
• pH monitor with closed loop control
  for water effluent usage
• Automatic pH neutralization of the
  recirculating fluid using a sodium
  hydroxide (optional)

Exhaust Gas/ Liquid Precursors

• BBr₃
• BCl₃
• Cl₂
• F₂
• H₂S
• H₂Se
• HBr
• HCl
• HF
• NH₃
• POCl₃

Features

• Maximum furnace operating temp. - 900 °C
• Digital temperature setpoint and readout
• Vertically mounted, inconel reaction tube with water cooled top flange
• Air flowmeter for oxidation
• Dry type air pump
• Water spray packed tower exhaust
• Pressure monitor interlocks out system and sounds an audible alarm if system clogs
• Automatic PLC system control

Exhaust Gas / Liquid Precursors

• B₂H₆
• BBr₃
• BCl₃
• Cl₂
• CO
  
• F₂
• GeH₄
• H₂
• HBr
• H₂S
• HCl
• HF
• H₂Se
• NH₃
• SiH₄
• PH₃
• POCl₃
• Metalorganics (DEZ, TMA, SiCl₄, TCS etc.)
• Hydrogencarbons (CH₄, C₂H₄, C₂H₂, etc.)

Turnkey solution for nanomaterial synthesis

First Nano offers turn-key system capabilities with support equipment such as Gas Cabinets and Gas Abatement Systems. All major components from one vendor makes interfacing easy. The First Nano EasyGas™ gas cabinet is capable of delivering a variety of toxic and hazardous gases. The EasyExhaust™ System will thermally pyrolyze and/or wet scrub the process effluents.

Our field proven system performance and solid customer base establishes First Nano as the clear choice in leading edge nanotechnology development equipment for the advanced research facility.

Please contact us for further details.